The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Aug. 01, 2023
Samsung Electronics Co., Ltd., Suwon-si, KR;
Wonjun Yang, Suwon-si, KR;
Sangho Yun, Suwon-si, KR;
Woojin Jung, Suwon-si, KR;
Minsu Kang, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
Provided is an overlay measuring method including setting an overlay offset on a substrate, obtaining a cell image by irradiating an electron beam, and obtaining a first image of an upper pattern and a second image of a lower pattern, based on the cell image, merging the first image with the second image, and measuring an overlay of the merged image, and correcting a measuring parameter used in measuring the overlay to improve consistency between the overlay offset and a measured result value of the overlay, wherein the measuring parameter is corrected based on a number of measuring failure values classified as a measurement failure in result values of the overlay.