The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2026

Filed:

Sep. 04, 2023
Applicant:

Jsr Corporation, Tokyo, JP;

Inventor:

Hiroyuki Tano, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/26 (2006.01); B08B 3/08 (2006.01); C11D 3/20 (2006.01); C11D 3/28 (2006.01); C11D 3/30 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); G03F 7/42 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 7/263 (2013.01); B08B 3/08 (2013.01); C11D 3/201 (2013.01); C11D 3/2068 (2013.01); C11D 3/26 (2013.01); C11D 3/28 (2013.01); C11D 7/261 (2013.01); C11D 7/264 (2013.01); C11D 7/3209 (2013.01); C11D 7/3218 (2013.01); C11D 7/3281 (2013.01); C11D 7/5022 (2013.01); G03F 7/42 (2013.01); H01L 21/02057 (2013.01); C11D 2111/22 (2024.01);
Abstract

A composition for semiconductor processing according to the disclosure contains (A) a compound represented by the following general formula (1), (B) a compound represented by the following general formula (2), (C) a compound having at least one functional group selected from the group consisting of an amino group and a salt thereof and a hydroxyl group (excluding the compound represented by the following general formula (1), a compound having a carboxyl group and a nitrogen-containing heterocyclic compound) and (D) a liquid medium, and, when the content of the (A) component is indicated by M[mass %] and the content of the (B) component is indicated by M[mass %], M/Mis 1.0×10to 1.0×10.RN(OH)  (1)RNH  (2)


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