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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12568674 B1

PDFFull Text
Date of Patent:
Mar. 03, 2026

Filed:

Nov. 30, 2021

Semiconductor laser anneal fabrication and system

Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Xiangzheng Bo, Plano, TX (US);

Huang-Chun Wen, Dallas, TX (US);

Assignee:

TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);

Attorneys:

Yudong Kim

Frank D. Cimino

Primary Examiner:

Brent A Fairbanks

Assistant Examiner:

Derek L Nielsen

Int. Cl.
CPC ...
H01L 21/77 (2017.01); B23K 26/082 (2014.01); B23K 26/32 (2014.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/77 (2013.01); B23K 26/082 (2015.10); B23K 26/32 (2013.01); B23K 2101/40 (2018.08);
Abstract

A method of forming an integrated circuit is described. The method first positions a semiconductor wafer in a processing chamber, and second, laser anneals at least a portion of the semiconductor wafer. The laser annealing includes tracing a first laser beam, in a first path having a first direction, across the at least a portion of the semiconductor wafer, tracing a second laser beam, in a second path having a second direction, opposite to and colinear with the first direction, across the at least a portion of the semiconductor wafer.

Find Patent Forward Citations

Bo, Xiangzheng. (2026). Semiconductor laser anneal fabrication and system (U.S. Patent No. 12568674). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12568674

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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