The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2026

Filed:

Mar. 08, 2023
Applicant:

Kokusai Electric Corporation, Tokyo, JP;

Inventors:

Hideto Yamaguchi, Toyama, JP;

Masaaki Ueno, Toyama, JP;

Seiya Shigematsu, Toyama, JP;

Masashi Sugishita, Toyama, JP;

Shuhei Maeda, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/4099 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4099 (2013.01); H01L 21/67098 (2013.01); G05B 2219/45031 (2013.01);
Abstract

According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target temperature column, wherein the future target temperature column is updated in accordance with a current temperature, a final target temperature and one of a temperature convergence ramp rate and a designated temperature convergence time.


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