The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2026

Filed:

Nov. 15, 2023
Applicant:

Lasertec Corporation, Yokohama, JP;

Inventor:

Ko Gondaira, Yokohama, JP;

Assignee:

LASERTEC CORPORATION, Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/93 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/93 (2013.01); G01N 2021/8835 (2013.01);
Abstract

An optical apparatus and an examination apparatus that are capable of improving thermal stability are provided. An optical apparatus according to the present disclosure includes a housing that includes an optical member and on which light is incident, and a control unit configured to control, in a case in which power of incident light incident on the housing changes, the incident light after the change so that energy calculated by integrating the power after the change over a predetermined time becomes equal to energy calculated by integrating the power before the change over the predetermined time. The case in which the power of the incident light changes may include stop and resumption of incidence of the incident light.


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