The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2026
Filed:
Oct. 09, 2023
Canon Kabushiki Kaisha, Tokyo, JP;
Niyaz Khusnatdinov, Round Rock, TX (US);
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Apparatuses and methods are provided for curing formable material between a substrate and a superstrate. The apparatus may include a substrate chuck configured to hold the substrate and a plurality of light sources configured to provide a uniform distribution of light to a surface of the formable material in contact with a featureless surface of the superstrate, the plurality of light sources having mixed polarizations relative to each other. The apparatus may include a light source configured to provide light to the formable material on the substrate and a controller configured to control rotation of at least one of the substrate chuck and the light source to provide a uniform distribution of light to a surface of the formable material in contact with a featureless surface of the superstrate. The formable material between the substrate and the superstrate may form a planarized layer on the substrate.