The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Aug. 04, 2021
Ebara Corporation, Tokyo, JP;
IS Engineering Co., Ltd., Niigata, JP;
Kenya Ito, Tokyo, JP;
Takumi Yamada, Tokyo, JP;
Mahito Shibuya, Niigata, JP;
Daisuke Nagumo, Niigata, JP;
EBARA CORPORATION, Tokyo, JP;
IS ENGINEERING CO., LTD., Niigata, JP;
Abstract
The present invention relates to a tape sticking system for sticking a protective tape for protecting a peripheral portion of a substrate, such as a wafer. The tape sticking apparatus () includes a substrate holder () for sticking, a side roller (), a first roller (), a second roller (), a roller-driving motor () coupled to the second roller (), and a nipping mechanism () for nipping the peripheral portion of the substrate (W) with the first roller () and the second roller (). The tape sticking apparatus () is configured to cause the second roller () to be rotated by use of the roller-driving motor () while nipping the peripheral portion of the substrate, held to the substrate holder () for sticking, with the first roller () and the second roller (), to thereby rotate the substrate.