The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2026

Filed:

Jul. 11, 2023
Applicant:

Femtometrix, Inc., Los Angeles, CA (US);

Inventors:

Timothy M. Wong, Los Angeles, CA (US);

William H. Howland, Wexford, PA (US);

Assignee:

FEMTOMETRIX, INC., Los Angeles, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 31/265 (2006.01); H01J 37/02 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/026 (2013.01); G01R 31/2601 (2013.01); G01R 31/2656 (2013.01); H01J 37/226 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/0048 (2013.01);
Abstract

Apparatus is described for performing simultaneous corona deposition and surface electric field induced second harmonic (EFISH) measurements. Example designs include systems including corona guns having a focus tube for deposition of corona charge with windows therein for passage of a laser beam incident on and reflected from a sample surface. Various designs may also employ masks proximal the distal end of the focusing tube and/or proximal the sample surface. In some implementations, the apparatus is used to make ungrounded and therefore non-invasive measurements, for example, on dielectric on semiconductor such as, e.g., interface state density (D), flatband voltage (V) and/or lifetime measurements.


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Quick Actions:

Wong, Timothy. (2026). Method and apparatus for non-invasive, non-intrusive, and un-grounded, simultaneous corona deposition and shg measurements (U.S. Patent No. 12562333). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12562333

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