The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2026
Filed:
Sep. 15, 2023
Disco Corporation, Tokyo, JP;
Hayato Iga, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
An inspection method of a workpiece includes a separation layer forming step of forming a separation layer composed of a modified layer parallel to an upper surface and cracks that extend from the modified layer inside the workpiece, an irradiation step of irradiating the whole of the upper surface of the workpiece in which the separation layer has been formed with light with such a wavelength as to be transmitted through the workpiece and reflect at the crack of the separation layer after the separation layer forming step is executed, a light reception step of receiving reflected light resulting from the irradiation in the irradiation step and reflection by the crack, and a determination step of determining the state of the separation layer on the basis of the intensity of the reflected light received in the light reception step.