Method of manufacturing semiconductor structure and semiconductor structure

Abstract

The present disclosure provides a method of manufacturing a semiconductor structure and a semiconductor structure. The method of manufacturing the semiconductor structure includes: providing a base, where contact structures arranged at intervals are formed on a surface of the base; forming, on the base, a stacked structure including alternately stacked a support layer and a sacrificial layer, where the stacked structure covers the contact structure; forming an isolation structure in the stacked structure, where the isolation structure runs through the sacrificial layer and part of the support layer along a direction perpendicular to the base, and is connected to the base through part of a remaining support layer, to divide the base into a first region and a second region; and forming a capacitor structure in the second region, where the capacitor structure is correspondingly connected to the contact structure in the second region.