The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Mar. 22, 2023
Samsung Electronics Co., Ltd., Suwon-si, KR;
Taekjin Kim, Suwon-si, KR;
Meehyun Lim, Suwon-si, KR;
Sungyeol Kim, Suwon-si, KR;
Junbum Park, Suwon-si, KR;
Sungyoung Yoon, Suwon-si, KR;
Jinyeong Yun, Suwon-si, KR;
Jungchul Lee, Suwon-si, KR;
Sungyong Lim, Suwon-si, KR;
Sunghwi Cho, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A semiconductor equipment monitoring apparatus including a wafer-type sensor inside a process chamber and configured to sense a plasma state inside the process chamber; a light detector and analyzer configured to detect and analyze light sensed by the wafer-type sensor; and a light coupler between the wafer-type sensor and the light detector and analyzer and configured to transmit the light sensed by the wafer-type sensor to the light detector and analyzer. The wafer-type sensor includes a plurality of sensors each comprising a passive element.