The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Jul. 20, 2023
Tokyo Electron Limited, Tokyo, JP;
Masashi Tsuchiyama, Koshi, JP;
Taro Yamamoto, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate treatment system includes a wet system, a dry system, and a relay transfer system. The wet system has a wet treatment apparatus which performs in a wet mode one of substrate treatments from a formation treatment of a resist film to a developing treatment of the resist film after exposure, and is coupled to an exposure apparatus. The dry system has a dry treatment apparatus which performs in a dry mode a same kind of substrate treatment by the wet treatment apparatus. The relay transfer system transfers the substrate between the wet system and the dry system. When viewed from a coupling direction, the wet system is arranged such that the exposure apparatus projects from one side in a depth direction perpendicular to the coupling direction in top view; and the dry system is adjacent to the one side of the wet system in the depth direction.