The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Feb. 23, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Eric Lau, Santa Clara, CA (US);
Andrew J. Nagengast, Sunnyvale, CA (US);
Charles C. Garretson, Monterey, CA (US);
Huanbo Zhang, San Jose, CA (US);
Zhize Zhu, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for optimizing polishing includes, for each respective retaining ring of a plurality of retaining rings mounted on a particular carrier head, performing measurements for a bottom surface of the respective retaining ring mounted on the particular carrier head using a coordinate measurement machine and collecting a respective removal profile of a substrate polished using the respective retaining ring. A machine learning model is trained based on the measurements of the bottom surface of the retaining ring and the respective removal profiles.