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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12550656 B1

PDFFull Text
Date of Patent:
Feb. 10, 2026

Filed:

May. 22, 2023

Method for manufacturing semiconductor device and forming photoresist pattern

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jieun Lee, Suwon-si, KR;

Jinpyoung Kim, Suwon-si, KR;

Jieun Song, Suwon-si, KR;

Janghoon Kim, Suwon-si, KR;

Woojin Jung, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Attorney:

Wolf, Greenfield & Sacks, P.C.

Primary Examiner:

Duy Vu N Deo

Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 3/08 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0206 (2013.01); B08B 3/08 (2013.01); H01L 21/027 (2013.01); H01L 21/31144 (2013.01); H01L 21/32139 (2013.01); G03F 7/40 (2013.01);
Abstract

A method of manufacturing a semiconductor device includes: forming a pattern formation material layer on a substrate; forming a photoresist on the pattern formation material layer; exposing and developing the photoresist to form a photoresist pattern; performing a first deionized water cleaning on the photoresist pattern; cleaning the photoresist pattern with a cleaning solution including a surfactant; and performing a second deionized water cleaning on the photoresist pattern.

Find Patent Forward Citations

Lee, Jieun. (2026). Method for manufacturing semiconductor device and forming photoresist pattern (U.S. Patent No. 12550656). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12550656

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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