The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Nov. 02, 2021
Asml Netherlands B.v., Veldhoven, NL;
Chenxi Lin, Newark, CA (US);
Yi Zou, Foster City, CA (US);
Tanbir Hasan, San Jose, CA (US);
Huina Xu, Los Altos, CA (US);
Ren-Jay Kou, Cupertino, CA (US);
Nabeel Noor Moin, Fort Collins, CO (US);
Kourosh Nafisi, San Jose, CA (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method and apparatus for identifying locations to be inspected on a substrate is disclosed. A defect location prediction model is trained using a training dataset associated with other substrates to generate a prediction of defect or non-defect and a confidence score associated with the prediction for each of the locations based on process-related data associated with the substrates. Those of the locations determined by the defect location prediction model as having confidences scores satisfying a confidence threshold are added to a set of locations to be inspected by an inspection system. After the set of locations are inspected, the inspection results data is obtained, and the defect location prediction model is incrementally trained by using the inspection results data and process-related data for the set of locations as training data.