The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Sep. 16, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Sriharsha Dharmapura Sathyanarayanamurthy, Bengaluru, IN;
Hanish Kumar Panavalappil Kumarankutty, Bangalore, IN;
Kirubanandan Naina Shanmugam, Bangalore, IN;
Manojkumar Shanmugasundaram, Bangalore, IN;
Sriharish Srinivasan, Bangalore, IN;
Vinay Konana Basavaraj, Bangalore, IN;
Applied Materials Inc., Santa Clara, CA (US);
Abstract
Embodiments of part coating reactors are provided herein. In some embodiments, a part coating reactor includes a lid assembly, comprising: a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, and wherein a lower surface of the body includes an annular alignment groove; and a blocker plate including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein an upper surface of the annular wall is disposed in the annular alignment groove of the body.