The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Sep. 10, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Kanto Nakamura, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 50/01 (2023.01); C23C 14/14 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); H10B 61/00 (2023.01); H10N 50/20 (2023.01); H10N 50/85 (2023.01);
U.S. Cl.
CPC ...
H10N 50/01 (2023.02); C23C 14/14 (2013.01); C23C 14/34 (2013.01); C23C 14/5853 (2013.01); H10B 61/00 (2023.02); H10N 50/20 (2023.02); H10N 50/85 (2023.02);
Abstract
There is provided a method of manufacturing a magnetoresistive element. The method comprises: (a) placing a substrate on a substrate support of an oxidation processing apparatus, the substrate having a ferromagnetic layer and a magnesium layer provided on the ferromagnetic layer; and (b) oxidizing the magnesium layer by supplying oxygen gas to the substrate in a state where a temperature of the substrate support is set to 150 Kelvin or less to form a magnesium oxide layer from the magnesium layer.