The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Feb. 03, 2023
Carl Zeiss Microscopy Gmbh, Jena, DE;
Björn Gamm, Koenigsbronn, DE;
Rainer Arnold, Thalfingen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A method of operating a particle beam system comprises positioning a sample at a given distance away from a lens focusing a particle beam; performing a measurement for each selected energization of a plurality of measurement energizations, wherein each measurement comprises recording a value derived from a reading of an electron detector, while the lens is energized with a selected measurement energization; and analyzing a dependency of the recorded values from the plurality of measurement energizations. Herein analyzing is based on a dependency of the number of electrons incident on the electron detector per unit time from the distance of the sample from the lens and from the energization of the lens.