The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Apr. 10, 2023
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Thines Kumar Perumal, Singapore, SG;
Aravind Vasanthakumar, Singapore, SG;
Subhash Guddati, Singapore, SG;
Montray Leavy, Singapore, SG;
Sanado Barolli, Bethlehem, CT (US);
Edward E. Jones, Woodbury, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 16/16 (2006.01); G05D 7/06 (2006.01); G05D 16/10 (2006.01);
U.S. Cl.
CPC ...
G05D 16/163 (2013.01); G05D 16/103 (2013.01); F17C 2205/0338 (2013.01); G05D 7/0635 (2013.01); Y10T 137/7761 (2015.04);
Abstract
A high pressure fluid storage device with a pressure sensing and regulating system configured for delivery of vaporized solid and liquid precursor materials at a regulated pressure range. At least some components of the pressure regulating system is contained internally within the storage device.
Perumal, Thines. (2026). Pressure sensing and regulating system (U.S. Patent No. 12541214). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12541214
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