The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Apr. 06, 2023
Applicant:
United Semiconductor (Xiamen) Co., Ltd., Fujian, CN;
Inventors:
Haipeng Zhu, Fujian, CN;
Xijun Guo, Singapore, SG;
Min-Hsien Chen, Taichung, TW;
Kuo Liang Huang, Singapore, SG;
Wen Yi Tan, Fujian, CN;
Assignee:
United Semiconductor (Xiamen) Co., Ltd., Fujian, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67201 (2013.01); H01L 21/67126 (2013.01);
Abstract
The invention provides a semiconductor processing machine, which comprises a plurality of chambers, at least one of the chamber is a load-lock chamber, and the load-lock chamber comprises a bottom surface and a top lid opposite to the bottom surface; and a gas pipeline is connected with the top lid of the load-lock chamber.