The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2026

Filed:

Jun. 28, 2024
Applicant:

Kla Corporation, Milpitas, CA (US);

Inventors:

Oleg Khodykin, Santa Cruz, CA (US);

Boris Korneev, Milpitas, CA (US);

Ilya Bezel, Mountain View, CA (US);

Andrey Zakirov, Milpitas, CA (US);

Andrey Evgenievich Stepanov, Moscow, RU;

Vitaliy Rerikh, Milpitas, CA (US);

Leonid Borisovich Zvedenuk, Moscov, RU;

Assignee:

KLA Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01); H01J 37/32 (2006.01); H05H 1/00 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H05H 1/2475 (2013.01); H01J 37/32339 (2013.01); H01J 37/3244 (2013.01); H05H 1/0025 (2013.01); H05H 1/46 (2013.01);
Abstract

A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.


Find Patent Forward Citations

Khodykin, Oleg. (2026). Laser-sustained plasma generation in supersonic gas jets (U.S. Patent No. 12538408). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12538408

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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