The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2026

Filed:

Aug. 03, 2023
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Andreas Schmaunz, Oberkochen, DE;

Simon Diemer, Lauchheim, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); H01J 37/02 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/304 (2013.01); H01J 37/026 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); H01J 2237/006 (2013.01);
Abstract

A method of operating a particle beam system comprises determining values of operating parameters of the particle beam system, and operating the particle beam system with the determined values of the operating parameters, and also recording a particle-microscopic image of a sample via the particle beam system. The operating parameters can represent at least a magnitude of a flow of a gas fed to the sample for charge compensation, a current of a particle beam directed at the sample for recording the image, a kinetic energy of the particles of the particle beam upon impinging on the sample, a scanning speed of the particle beam over the sample for recording the image, and a magnification of the recorded image.


Find Patent Forward Citations

Loading…