The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Feb. 20, 2024
Kla Corporation, Milpitas, CA (US);
Guoheng Zhao, Palo Alto, CA (US);
Bret Whiteside, Gilroy, CA (US);
Daniel Kavaldjiev, San Jose, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
Stephen Biellak, Sunnyvale, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An inspection system may include an illumination source configured to generate an illumination beam with multiple wavelengths, an illumination sub-system including one or more illumination optics to direct the illumination beam to a sample at an off-axis angle, and an imaging sub-system. The system may include an objective lens to collect sample light, where the objective lens exhibits chromatic aberration within a spectrum of the illumination beam. The system may include one or more detectors to image the sample. A size of a point spread function (PSF) of the imaging sub-system relative to a pixel size of at least one of the one or more detectors may be adjustable. The system may include a tunable spectral filter with an adjustable linewidth configured to selectively adjust a spectrum of at least one of the illumination beam or the sample light.