The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Mar. 29, 2021
Asml Netherlands B.v., Veldhoven, NL;
Arjan Gijsbertsen, Vught, NL;
Viktor Trogrlic, Eindhoven, NL;
Peter Fernand William Jozef Dendas, Koersel, BE;
Mihaita Popinciuc, Eindhoven, NL;
Andrey Valerievich Rogachevskiy, Den Bosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Systems, apparatuses, and methods are provided for generating level data. An example method can include receiving first level data for a first region of a substrate. The first region can include a first subregion having a first surface level, and a second subregion having a second surface level. The example method can further include generating, based on the first level data, measurement control map data. The example method can further include generating, based on the measurement control map data, second level data for a second region of the substrate. The second region can include a plurality of third subregions each having a third surface level equal to about the first surface level, and, optionally, no region having a surface level equal to about the second surface level.
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