The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Jul. 20, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Kirk Allen Fisher, Tempe, AZ (US);
John Ford, Tempe, AZ (US);
James M. Amos, Apache Junction, AZ (US);
Hui Chen, Tempe, AZ (US);
Shawn Joseph Bonham, Mesa, AZ (US);
Xinning Luan, Tempe, AZ (US);
Philip Michael Amos, Apache Junction, AZ (US);
Aimee S. Erhardt, Tempe, AZ (US);
Cathryne A. Ryan, Minden, NV (US);
Michael R. Riordan, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments disclosed herein include to a component support for use in coating chamber components via chemical vapor deposition (CVD). The component support includes contact rods configured to contact chamber components at fixture points located on the backside of the chamber components. The component supports are configured to support the chamber components in the processing volume with minimal contact of the chamber components. The fixture points on the backside reduce exposure of the fixture points to reactant gases when the chamber components are installed.