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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12534358 B1

PDFFull Text
Date of Patent:
Jan. 27, 2026

Filed:

Jun. 24, 2024

Semiconductor device structure with movable membrane

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yi-Chuan Teng, Zhubei, TW;

Chun-Yin Tsai, Hsinchu, TW;

Chia-Hua Chu, Zhubei, TW;

Chun-Wen Cheng, Zhubei, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

McClure, Qualey & Rodack, LLP

Primary Examiner:

Jarrett J Stark

Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 19/00 (2006.01); H10N 30/30 (2023.01);
U.S. Cl.
CPC ...
B81B 3/001 (2013.01); B81B 3/007 (2013.01); B81C 1/00158 (2013.01); H04R 19/005 (2013.01); H10N 30/308 (2023.02); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2207/07 (2013.01);
Abstract

Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a dielectric layer formed over the substrate. The semiconductor device structure further includes a movable membrane formed over the dielectric layer. In addition, the movable membrane includes first recessed portions arranged in a ring shape in a top view and second recessed portions surrounded by the first recessed portions.

Find Patent Forward Citations

Teng, Yi-Chuan. (2026). Semiconductor device structure with movable membrane (U.S. Patent No. 12534358). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12534358

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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