The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Apr. 11, 2022
Applicant:
Asmpt Singapore Pte. Ltd., Singapore, SG;
Inventors:
Assignee:
ASMPT SINGAPORE PTE. LTD., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 15/06 (2006.01); F16C 32/06 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0616 (2013.01); F16C 32/06 (2013.01);
Abstract
A pick-up chuck for handling a substrate has a chuck body defining a support surface, a gas relay aperture for transmitting a gas, a vacuum aperture portion configured in use to generate a vacuum force to pick up the substrate, and a flow of said gas through the gas relay aperture onto the said support surface towards the vacuum aperture portion. A gas bearing structure arranged on said support surface is shaped to provide a gas bearing between the substrate and said support surface by utilizing the flow of said gas between the gas relay aperture and the vacuum aperture portion.