logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12529876 B1

PDFFull Text
Date of Patent:
Jan. 20, 2026

Filed:

Apr. 12, 2022

Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device

Applicant:

Nearfield Instruments B.v., Rotterdam, NL;

Inventors:

Hamed Sadeghian Marnani, Rotterdam, NL;

Taras Piskunov, Schiedam, RU;

Assignee:

Nearfield Instruments B.V., Rotterdam, NL;

Attorney:

Banner & Witcoff, Ltd.

Primary Examiner:

Ryan Crockett

Int. Cl.
CPC ...
G02B 21/00 (2006.01); G02B 1/10 (2015.01); G02B 9/14 (2006.01); G02B 21/02 (2006.01); G02B 21/08 (2006.01); G02B 21/36 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0016 (2013.01); G02B 1/10 (2013.01); G02B 9/14 (2013.01); G02B 21/025 (2013.01); G02B 21/082 (2013.01); G02B 21/362 (2013.01); G02B 21/365 (2013.01); H01L 21/67259 (2013.01); H01L 21/682 (2013.01);
Abstract

An optical microscope () is provided herewith that is configured to provide an image in an image plane () of an object in an object plane (). The optical microscope comprises in an order along an optical axis () from the object plane to the image plane, a first lens (), a second lens () and a third lens (). The first lens () has a first lens surface () at the side of the object plane and a second lens surface () at a side of the image plane, the first lens surface having a first semi-reflective coating (). The second lens () has a third lens surface () at the side of the object plane and a fourth lens surface () at a side of the image plane. The third lens () has a fifth lens surface () at the side of the object plane and a sixth lens surface () at a side of the image plane, the sixth lens surface having a second semi-reflective coating (). The optical microscope is compact and provides for a diffraction-limited performance (MTF) over the full field of view with low distortion and low field curvature.

Find Patent Forward Citations

Sadeghian Marnani, Hamed. (2026). Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device (U.S. Patent No. 12529876). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12529876

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…