The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2026

Filed:

May. 19, 2023
Applicant:

Fei Company, Hillsboro, OR (US);

Inventor:

Shyam Sundar Aswadha Narayanan, Richardson, TX (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01R 1/067 (2006.01); G01R 27/26 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2889 (2013.01); G01R 1/06738 (2013.01); G01R 27/2605 (2013.01);
Abstract

Techniques for detecting contact of a probe on a surface are described. A computer-implemented method for detecting nanoscale contact of a probe tip on a surface includes positioning a probe tip at a first displacement relative to a sample surface, the sample surface exposing one or more nanostructures. The method can include displacing the probe tip toward the sample surface. The method can include generating response data for the probe tip based at least in part on one or more electrical properties of the probe tip. The method can also include detecting a contact between the sample surface and the probe tip using the response data.


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