The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Jun. 18, 2021
Hitachi High-tech Corporation, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
An imaging system images measurement targets arranged on a plane and includes a light source that irradiates the measurement targets with light, a photodetector that detects light from the measurement targets, one or more lenses, an adjustment mechanism that focuses imaging on the measurement targets, and a drive mechanism that changes the relative position of the photodetector and the measurement targets. The measurement targets have the same shape and size and are arranged at equal pitches in a longitudinal direction and a lateral direction on the plane, based on a value obtained by multiplying the pitch of the measurement targets by an imaging magnification that is an integer multiple of two or more times of a pixel pitch of the photodetector. In the changing of the relative position by the drive mechanism, an adjustment unit of an imaging range is equal to or less than the pixel pitch.