The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Mar. 02, 2023
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sangho Jang, Suwon-si, KR;

Dongsoo Lee, Suwon-si, KR;

Kibeom Kil, Suwon-si, KR;

Yeongseok Kim, Suwon-si, KR;

Wooram Oh, Suwon-si, KR;

Youngshin Choi, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 47/90 (2006.01); H01L 21/67 (2006.01); H05K 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6773 (2013.01); B65G 47/901 (2013.01); H01L 21/67144 (2013.01); H01L 21/67736 (2013.01); H01L 21/67742 (2013.01); H01L 21/67757 (2013.01); H05K 13/0061 (2013.01);
Abstract

A substrate loading apparatus includes a pickup apparatus configured to move a magazine in a first direction, a second direction and a third direction, an elevator defining a plurality of waiting spaces, a stage configured to support the magazine, and an insert apparatus configured to transfer substrates in the magazine. At least one of the plurality of waiting spaces of the elevator is configured to selectively receive the magazine, and the pickup apparatus is spaced apart from the elevator and the stage in the third direction.


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