The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Aug. 10, 2023
Kioxia Corporation, Tokyo, JP;
Kiminori Yoshino, Kuwana Mie, JP;
KIOXIA CORPORATION, Tokyo, JP;
Abstract
A level difference measuring apparatus that measures a level difference on a specimen surface having unevenness formed thereon includes: an atomic force microscope configured to measure a surface height of each of a plurality of measurement points set on the specimen surface; and a level difference calculation unit configured to calculate the level difference in a measurement target area including the plurality of measurement points. The level difference calculation unit sets a measurement area including at least one level difference portion in the measurement target area, generates a histogram by histogramming the surface heights of the measurement points provided in the measurement area, and calculates, based on the histogram, the level difference of the level difference portion provided in the measurement area.
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