The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Oct. 08, 2021
Lam Research Corporation, Fremont, CA (US);
Shriram Vasant Bapat, Beaverton, OR (US);
Pankaj Ghanshyam Ramnani, Wilsonville, OR (US);
Brian Joseph Williams, Tigard, OR (US);
Christopher Matthew Jones, Woodburn, OR (US);
Curtis W. Bailey, West Linn, OR (US);
Emile Draper, Molalla, OR (US);
Nagraj Shankar, Tualatin, OR (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
In some examples, a faceless showerhead comprises a body including a backing plate, the body devoid of a faceplate or plenum; a gas supply stem to admit gas into the showerhead; and a baffle supported adjacent the backing plate or the gas supply stem. The faceless showerhead may further comprise at least one support element for supporting the baffle in a baffle cavity in the backing plate or the gas supply stem.