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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12516074 B1

PDFFull Text
Date of Patent:
Jan. 06, 2026

Filed:

Mar. 17, 2022

Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Yuusuke Ootsubo, Tokyo, JP;

Ryuichi Serizawa, Tokyo, JP;

Kazunori Sakai, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Element IP, PLC

Primary Examiner:

Mark F Huff

Assistant Examiner:

Richard David Champion

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C07F 7/28 (2006.01); C07F 15/04 (2006.01); C07F 15/06 (2006.01); G03F 7/09 (2006.01); G03F 7/20 (2006.01); G03F 7/039 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
C07F 7/28 (2013.01); C07F 15/04 (2013.01); C07F 15/06 (2013.01); G03F 7/094 (2013.01); G03F 7/2004 (2013.01); G03F 7/039 (2013.01); G03F 7/11 (2013.01); G03F 7/20 (2013.01); G03F 7/40 (2013.01);
Abstract

A composition includes: a metal compound including a ligand; and a solvent. The ligand is derived from a compound represented by formula (1). L represents an oxygen atom or a single bond; Rrepresents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms; Rand Reach independently represent a hydrogen atom or a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, or Rand Rbind with each other and represent an alicyclic structure having 3 to 20 ring atoms together with the carbon atom to which Rand Rbond, or Rand either Ror Rbind with each other and represent a lactone ring structure having 4 to 20 ring atoms or a cyclic ketone structure having 4 to 20 ring atoms together with the atom chain to which Rand either Ror Rbond.

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