The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Aug. 02, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Xiang Liu, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefe, CN;
Abstract
A method for preparing a semiconductor structure, including: providing a structure to be processed which includes a semiconductor substrate, semiconductor fins extending along a first direction on the semiconductor substrate, and a first filling layer which fills gaps between two adjacent ones of the semiconductor fins; forming a first protective layer on the structure to be processed, and patterning the first protective layer; and etching the semiconductor fins and the first filling layer along a second direction intersecting the first direction by taking the patterned first protective layer as a mask to etch the semiconductor fins into semiconductor pillars and connecting ridges connecting two adjacent ones of the semiconductor pillars, in which an upper surface of the connecting ridge is higher than the upper surface of the first filling layer at both sides of the connecting ridge.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile