The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Sep. 29, 2022
Applicant:
Changxin Memory Technologies, Inc., Hefei, CN;
Inventors:
Jingwen Lu, Hefei, CN;
Xiaoling Wang, Hefei, CN;
Assignee:
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10B 12/00 (2023.01);
U.S. Cl.
CPC ...
H10B 12/053 (2023.02); H10B 12/34 (2023.02);
Abstract
A semiconductor structure and a method for forming the same are provided. The method for forming the semiconductor structure includes: providing a substrate; etching the substrate to form multiple active areas, trenches each positioned between adjacent active areas, and air gaps positioned below the active areas; and forming a filler layer filling at least each of the trenches.