The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Mar. 20, 2023
Gigaphoton Inc., Tochigi, JP;
Takashi Suganuma, Oyama, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
An extreme ultraviolet light generation apparatus includes a first light source outputting first excitation light, a laser oscillator including an active medium and performing laser oscillation by irradiating the active medium with the first excitation light to output the laser light, a measurement instrument measuring a pulse energy and a pulse time width of the laser light, a temperature regulator that adjusts a temperature of a cooling medium that cools the first light source, and a processor. The processor controls the temperature regulator to adjust the temperature of the cooling medium so that the pulse energy measured by the measurement instrument falls within a target range of the pulse energy, and adjust a current value of a current supplied to the first light source so that the pulse time width measured by the measurement instrument falls within a target range of the pulse time width.