The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Jan. 17, 2023
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Kentaro Wada, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 1/36 (2024.01); B08B 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B08B 1/36 (2024.01); B08B 3/022 (2013.01);
Abstract
A cleaning apparatus for cleaning a workpiece includes a holding unit for holding an outer circumferential portion of the workpiece thereon, a rotating mechanism for rotating the holding unit, and a cleaning unit for cleaning a reverse side of the workpiece. The cleaning unit includes a cleaning member for contacting the reverse side of the workpiece and a drive mechanism for moving the cleaning member toward and away from the reverse side of the workpiece.