The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2025

Filed:

Sep. 01, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Guan-Qi Chen, Kaohsiung, TW;

Chen Chi Hsiao, Taipei, TW;

Kun-Tsang Chuang, Miaoli County, TW;

Fang Yi Liao, Tainan, TW;

Yu Shan Hung, Tainan, TW;

Chun-Chia Chen, Tainan, TW;

Yu-Shan Huang, Kaohsiung, TW;

Tung-I Lin, Tainan, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/65 (2025.01); H10D 30/01 (2025.01); H10D 62/13 (2025.01); H10D 62/17 (2025.01);
U.S. Cl.
CPC ...
H10D 30/65 (2025.01); H10D 30/0281 (2025.01); H10D 62/154 (2025.01); H10D 62/158 (2025.01); H10D 62/235 (2025.01);
Abstract

A semiconductor device and method of manufacturing the same are provided. The semiconductor device includes a substrate and a gate structure disposed on the substrate. The semiconductor device also includes a source region and a drain region disposed within the substrate. The substrate includes a drift region laterally extending between the source region and the drain region. The semiconductor device further includes a first stressor layer disposed over the drift region of the substrate. The first stressor layer is configured to apply a first stress to the drift region of the substrate. In addition, the semiconductor device includes a second stressor layer disposed on the first stressor layer. The second stressor layer is configured to apply a second stress to the drift region of the substrate, and the first stress is opposite to the second stress.


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