Semiconductor device including active pillars made of three semiconductor layers, method for operating same, and semiconductor structure

Abstract

A semiconductor device, including: a substrate; an active pillar array structure located on the substrate; and a plurality of first word lines and a plurality of second word lines. The active pillar array structure includes a plurality of active pillars arrayed in a second direction and a third direction, each active pillar extends in a first direction. The active pillar includes a first semiconductor layer, a second semiconductor layer and a third semiconductor layer stacked sequentially in the second direction. The first word lines and the second word lines extend in the third direction. Each active pillar arranged in the third direction corresponds to a respective first word line and a respective second word line. Each first word line covers the first semiconductor layer in the respective active pillar, and each second word line covers the third semiconductor layer in the respective active pillar.