The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 23, 2025

Filed:

May. 23, 2024
Applicant:

Globalwafers Co., Ltd., Hsinchu, TW;

Inventors:

Yu-Chiao Wu, Frontenac, MO (US);

William Lynn Luter, St. Charles, MO (US);

Richard J. Phillips, St. Peters, MO (US);

James Dean Eoff, Montgomery City, MO (US);

Assignee:

GlobalWafers Co., Ltd., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 15/04 (2006.01); C30B 15/14 (2006.01); C30B 29/06 (2006.01);
U.S. Cl.
CPC ...
C30B 15/04 (2013.01); C30B 15/14 (2013.01); C30B 29/06 (2013.01); Y10T 117/1032 (2015.01); Y10T 117/1056 (2015.01);
Abstract

A method for producing a single crystal silicon ingot includes adding polycrystalline silicon to a crucible disposed within a chamber defined by a housing of an ingot puller apparatus, maintaining the chamber at a first pressure, heating the chamber using radiant heat to melt the polycrystalline silicon and form a silicon melt in the crucible, pulling a single crystal silicon ingot from the silicon melt, channeling a liquid dopant at a second pressure greater than the first pressure into a feed tube positioned in the chamber, vaporizing the liquid dopant into a vaporized dopant by flash evaporation at the first pressure within the feed tube, and directing the vaporized dopant from the feed tube toward a surface of the silicon melt to cause the vaporized dopant to enter the silicon melt as a dopant while pulling the single crystal silicon ingot from the silicon melt.


Find Patent Forward Citations

Loading…