The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Jul. 31, 2023
Applied Materials, Inc., Santa Clara, CA (US);
William Durand, San Francisco, CA (US);
Abdullah Zafar, Santa Clara, CA (US);
Usman Chowdhury, Santa Clara, CA (US);
Amir Bayati, San Jose, CA (US);
Farzad Houshmand, Mountain View, CA (US);
David J. Coumou, Webster, NY (US);
Kasturi Sarang, San Jose, CA (US);
Kenric Choi, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Vapor concentration sensors for deposition process or deposition chamber condition monitoring are described. In an example, a deposition system includes a deposition chamber, a deposition precursor source coupled to an inlet of the deposition chamber, and a non-dispersive infrared (NDIR) vapor concentration sensor between the deposition precursor source and the deposition chamber.