The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2025
Filed:
Apr. 03, 2024
Applicant:
Comptek Solutions Oy, Turku, FI;
Inventors:
Vicente Calvo Alonso, Piispanristi, FI;
Jouko Lång, Lieto, FI;
Assignee:
Comptek Solutions Oy, Turku, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/0209 (2013.01); C23C 16/0227 (2013.01); C23C 16/0272 (2013.01); C23C 16/45519 (2013.01); C23C 16/45536 (2013.01); C23C 16/45544 (2013.01);
Abstract
The processing of the surface of a substrate to grow a high-quality thin film layer with Atomic Layer Deposition (ALD) includes first preparing the substrate surface and then creating an improved interface layer on the surface of the substrate prior the ALD growth. These processes are achieved within a single processing equipment.