The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Jun. 17, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Ying-Chih Hsu, Hsinchu, TW;

Wen-Shiang Liao, Miaoli County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01F 27/28 (2006.01); H01F 41/04 (2006.01); H01L 21/48 (2006.01); H01L 23/00 (2006.01); H01L 23/64 (2006.01); H01L 25/065 (2023.01); H10D 1/20 (2025.01);
U.S. Cl.
CPC ...
H01L 23/49822 (2013.01); H01F 27/2804 (2013.01); H01F 41/041 (2013.01); H01L 21/4853 (2013.01); H01L 21/4857 (2013.01); H01L 23/49816 (2013.01); H01L 23/49866 (2013.01); H01L 23/645 (2013.01); H01L 24/16 (2013.01); H01L 25/0655 (2013.01); H10D 1/20 (2025.01); H01F 2027/2809 (2013.01); H01L 2224/16227 (2013.01);
Abstract

A method of manufacturing a semiconductor device is provided. A permalloy device is received. An interposer die is formed. A conductive coil is formed over a substrate, and the conductive coil includes a bottom metal layer over the substrate, a middle metal layer and a top metal layer interconnected to each other. The permalloy device is disposed in the middle metal layer through a pick and place operation before forming the top metal layer of the conductive coil. A semiconductor die is bonded to the interposer die. The permalloy device has a polygonal ring shape wrapped with the conductive coil.


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