The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Aug. 30, 2023
Applicant:

Shanghai Huali Integrated Circuit Corporation, Shanghai, CN;

Inventor:

Hao Jiang, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); H01L 22/32 (2013.01);
Abstract

The present application discloses a four-terminal resistance testing structure. A test key includes a resistor string formed by connecting two or more tested resistors in series. Two ends of each tested resistor are respectively provided with one first pad. At least one of the two first pads of each tested resistor is shared as the first pad of an adjacent tested resistor. Each tested resistor includes two force terminals and two sense terminals. The two force terminals are formed by the first pads at the two ends of the tested resistor, and each of the two sense terminals is composed of a pad located at a position adjacent to the corresponding force terminal. The present application can reduce the number of pads and thus save the area on the premise of ensuring the measurement accuracy.


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