The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Jan. 12, 2024
Asml Netherlands B.v., Veldhoven, NL;
Bernardo Kastrup, Veldhoven, NL;
Johannes Catharinus Hubertus Mulkens, Valkenswaard, NL;
Marinus Aart Van Den Brink, Moergestel, NL;
Jozef Petrus Henricus Benschop, Veldhoven, NL;
Erwin Paul Smakman, Eindhoven, NL;
Tamara Druzhinina, Eindhoven, NL;
Coen Adrianus Verschuren, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An electron beam inspection apparatus, the apparatus including a plurality of electron beam columns, each electron beam column configured to provide an electron beam and detect scattered or secondary electrons from an object, and an actuator system configured to move one or more of the electron beam columns relative to another one or more of the electron beam columns, the actuator system including a plurality of first movable structures at least partly overlapping a plurality of second movable structures, the first and second movable structures supporting the plurality of electron beam columns.