The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Jun. 18, 2020
Applicant:

Daicel Corporation, Osaka, JP;

Inventors:

Akira Eguchi, Tokyo, JP;

Kazuhiro Uehara, Tokyo, JP;

Masayoshi Furukawa, Tokyo, JP;

Takashi Maruyama, Tokyo, JP;

Assignee:

DAICEL CORPORATION, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); C07D 313/06 (2006.01); C07D 321/10 (2006.01); C07D 327/02 (2006.01); C07D 407/14 (2006.01); C07D 411/14 (2006.01); C08F 220/28 (2006.01); C08F 224/00 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C07D 313/06 (2013.01); C07D 321/10 (2013.01); C07D 327/02 (2013.01); C07D 407/14 (2013.01); C07D 411/14 (2013.01); C08F 220/283 (2020.02); C08F 224/00 (2013.01); G03F 7/039 (2013.01); G03F 7/20 (2013.01); G03F 7/30 (2013.01);
Abstract

Provided is a monomer that improves solubility in organic solvents, hydrolyzability, and solubility in water after hydrolysis of a resin as well as imparts higher heat resistance to a resin. A resin for a photoresist containing a polymerization unit represented by Formula (Y), wherein Rrepresents a halogen atom or an alkyl group having from 1 to 6 carbons and having a halogen atom; Ris a substituent attached to a ring and represents a halogen atom, an alkyl group that has from 1 to 6 carbons and may have a halogen atom, a hydroxyalkyl group that has from 1 to 6 carbons and may have a halogen atom and has a hydroxyl group moiety which may be protected by a protecting group, a carboxyl group that may form a salt, or a substituted oxycarbonyl group; A represents an alkylene group having from 1 to 6 carbons, an oxygen atom, a sulfur atom, or no bond; m is the number of Rand represents an integer from 0 to 8; X represents an electron-withdrawing substituent; n is the number of X and represents an integer from 1 to 9; B represents a single bond or a linking group; and a steric position of a COOB-group attached to a polymer chain may be either endo or exo.


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