The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Jun. 01, 2021
Applicant:

Techinsights Inc., Ottawa, CA;

Inventors:

Christopher Pawlowicz, Ottawa, CA;

Spyridon Ntais, Ottawa, CA;

Assignee:

TECHINSIGHTS INC., Ottawa, CA;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01N 23/2251 (2018.01); H01L 23/14 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2898 (2013.01); G01N 23/2251 (2013.01); H01L 23/147 (2013.01); G01N 2223/6116 (2013.01);
Abstract

Described are various embodiments of a contrast-enhancing staining system and method. In one embodiment, a method is described for enhancing contrast in an image of a substrate surface between regions of said substrate having different charge carrier characteristics. The method comprises exposing said substrate to a staining precursor comprising an oxidant; directing microwave electromagnetic radiation at the substrate, said microwave electromagnetic radiation enhancing a reaction rate of said oxidant reacting into a deposition material, said reaction rate being related to the charge carrier characteristics of a proximal region; and acquiring an image of said substrate surface indicating a visual contrast between each of said regions based on differential deposition of the deposition material therebetween.


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