logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12498276 B1

PDFFull Text
Date of Patent:
Dec. 16, 2025

Filed:

Jan. 27, 2021

Process estimation system, process data estimation method, and recording medium

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Naoshige Fushimi, Nirasaki, JP;

Hidefumi Matsui, Nirasaki, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Armstrong Teasdale LLP

Primary Examiner:

Laura Martin

Assistant Examiner:

Philip L Cotey

Int. Cl.
CPC ...
G01K 13/02 (2021.01); G01K 7/42 (2006.01); G05B 23/02 (2006.01); G06F 30/10 (2020.01); H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/31 (2006.01); G06F 119/08 (2020.01);
U.S. Cl.
CPC ...
G01K 13/02 (2013.01); G01K 7/427 (2013.01); G05B 23/02 (2013.01); G06F 30/10 (2020.01); H01L 21/00 (2013.01); H01L 21/02 (2013.01); H01L 21/31 (2013.01); G06F 2119/08 (2020.01);
Abstract

Provided are a process estimation system and a process data estimation method for appropriately estimating process data, and a program. The process estimation system includes: an input part configured to input actual sensor data detected by a sensor of a substrate processing apparatus; a virtual sensor data generation part configured to generate virtual sensor data for a virtual sensor based on the actual sensor data and a physical model; and a process data estimation part configured to estimate process data based on the virtual sensor data.

Find Patent Forward Citations

Quick Actions:

Fushimi, Naoshige. (2025). Process estimation system, process data estimation method, and recording medium (U.S. Patent No. 12498276). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12498276

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…