The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 16, 2025

Filed:

Feb. 10, 2023
Applicant:

Jeol Ltd., Tokyo, JP;

Inventors:

Atsuhiro Fujii, Tokyo, JP;

Kouta Itoh, Tokyo, JP;

Yuka Otake, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
G01J 3/2823 (2013.01); G01J 3/027 (2013.01);
Abstract

A phase analyzer includes a data acquisition unit that acquires a plurality of pieces of spectrum imaging data in which positions on a sample are associated with spectra which are based on signals from the sample; a first acquisition unit that acquires a first representative spectrum group for each piece of spectrum imaging data by performing multivariate analysis on each of the plurality of pieces of spectrum imaging data; a second acquisition unit that acquires a second representative spectrum group by performing multivariate analysis on the plurality of first representative spectrum groups acquired by the first acquisition unit; and a phase analysis unit that performs phase analysis on each of the plurality of pieces of spectrum imaging data by using the second representative spectrum group.


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